Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table

Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table

US Patent 8634052 · Granted Jan 21, 2014

Estimated economic value: $5,052,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Laser focussing module2024
Stage apparatus2024
Stage apparatus2023
Method of positioning a carrier on a flat surface, and assembly of a carrier and2023
Lithographic apparatus and device manufacturing method involving a heater2022
Methods and instruments for measuring samples in a well plate2022
Lithographic apparatus and device manufacturing method2021
Lithographic apparatus and device manufacturing method2021
Torsion wave based fluid density measuring device and method2021
Lithographic apparatus and device manufacturing method involving a heater2020
Lithographic apparatus and device manufacturing method2020
High power adaptive mirror2020