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Home › Sol-gel and mask patterning for thin-film capacitor fabrication, thin-film capacitors fabricated thereby, and systems containing same

Sol-gel and mask patterning for thin-film capacitor fabrication, thin-film capacitors fabricated thereby, and systems containing same

US Patent 8623737 · Granted Jan 7, 2014

Estimated economic value: $13,955,000 ⓘ

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