Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Track spin wafer chuck

Track spin wafer chuck

US Patent 8616539 · Granted Dec 31, 2013

Estimated economic value: $3,390,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Radiofrequency filter and manufacturing method thereof2025
Semiconductor processing tool and methods of operation2025
Semiconductor wafer cooling2025
Semiconductor processing tool and methods of operation2025
Method of manufacturing semiconductor structure2025
Method and apparatus for coating photoresist over a substrate2024
Semiconductor processing tool and methods of operation2024
Semiconductor processing tool and methods of operation2023
Semiconductor processing tool and methods of operation2023
Semiconductor wafer cooling2023
Exposure method and exposure apparatus2022
Method of manufacturing semiconductor structure2022