Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sensor device and method for manufacturing a sensor device

Sensor device and method for manufacturing a sensor device

US Patent 8584523 · Granted Nov 19, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Micromechanical inertial sensor2024
Micromechanical structure and micromechanical sensor2024
Micromechanical structure for an acceleration sensor2020
Micromechanical z-acceleration sensor2020
Micromechanical component2019
Getter device for a micromechanical component2018
Device and method for determining a state of an object which is to be monitored2018
Acceleration sensor and method for operating an acceleration sensor2016
Method for manufacturing a micromechanical structure, and micromechanical struct2015
Acceleration sensor having a damping device2014
Micromechanical sensor having a variable capacitor and method for detecting elec2012