Micromechanical z-acceleration sensor

Assignee

• Robert Bosch Gmbh

Inventors

• Antoine Puygranier (5 patents)
• Denis Gugel (8 patents)
• Guenther-Nino-Carlo Ullrich (13 patents)
• Markus Linck-Lescanne (5 patents)
• Sebastian Guenther (10 patents)
• Timm Hoehr (6 patents)

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