Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Overlay mark assistant feature

Overlay mark assistant feature

US Patent 8513821 · Granted Aug 20, 2013

Estimated economic value: $7,619,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor device structure and methods of forming the same2025
Touchpad module2025
Dual etch-stop layer structure2025
Interconnection structure and methods of forming the same2025
Method of fabricating semiconductor device with reduced trench distortions2025
Self-assembled dielectric on metal rie lines to increase reliability2025
Using cumulative heat amount data to qualify hot plate used for post-exposure ba2025
Semiconductor device including source/drain contact having height below gate sta2025
Self-aligned interconnect structure2025
Dielectric on wire structure to increase processing window for overlying via2025
Structure and formation method of semiconductor device with carbon-containing co2025
Interconnect conductive structure comprising two conductive materials2025