Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Droplet generator with actuator induced nozzle cleaning

Droplet generator with actuator induced nozzle cleaning

US Patent 8513629 · Granted Aug 20, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Nozzle apparatus2025
Target delivery system2025
Target delivery system2023
Reflective display2023
Apparatus and method for extending target material delivery system lifetime2023
Apparatus and method for extending target material delivery system lifetime2023
Target formation apparatus2022
Method of purifying target material for an EUV light source2022
Method of purifying target material for an EUV light source2022
Method of purifying target material for an EUV light source2022
Reflective display2021
Supply system for an extreme ultraviolet light source2021