Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Supporting device, optical apparatus, exposure apparatus, and device manufacturing method

Supporting device, optical apparatus, exposure apparatus, and device manufacturing method

US Patent 8508870 · Granted Aug 13, 2013

Estimated economic value: $51,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Supporting device, optical apparatus, exposure apparatus, and device manufacturi2011
Support mechanism, exposure apparatus having the same, and aberration reducing m2010
Holding mechanism, optical apparatus and device manufacturing method2007
Support mechanism, exposure apparatus having the same, and aberration reducing m2006
Retainer, exposure apparatus, and device fabrication method2006
Correction member, retainer, exposure apparatus, and device fabrication method2005
Lens barrel and projection aligner2003
Lens barrel having deformed optical element, and projection including same2001
Projection and exposure apparatus including an optical member and a holding memb2000
Mode changing slider plate mechanism for tape recording and/or reproducing appar1992