Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Holding mechanism, optical apparatus and device manufacturing method

Holding mechanism, optical apparatus and device manufacturing method

US Patent 7218462 · Granted May 15, 2007

Estimated economic value: $392,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Supporting device, optical apparatus, exposure apparatus, and device manufacturi2013
Supporting device, optical apparatus, exposure apparatus, and device manufacturi2011
Support mechanism, exposure apparatus having the same, and aberration reducing m2010
Support mechanism, exposure apparatus having the same, and aberration reducing m2006
Retainer, exposure apparatus, and device fabrication method2006
Correction member, retainer, exposure apparatus, and device fabrication method2005
Lens barrel and projection aligner2003
Lens barrel having deformed optical element, and projection including same2001
Projection and exposure apparatus including an optical member and a holding memb2000
Mode changing slider plate mechanism for tape recording and/or reproducing appar1992