Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Device for doping, deposition or oxidation of semiconductor material at low pressure

Device for doping, deposition or oxidation of semiconductor material at low pressure

US Patent 8460468 · Granted Jun 11, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for depositing chalcogens2011
Assembly for purifying toxic gases from production processes2009