Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like

Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like

US Patent 8451431 · Granted May 28, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Motor with force constant modeling and identification for flexible mode control2022
Dual valve fluid actuator assembly2021
Magnet array for moving magnet planar motor2019
Magnetic sensor calibration and servo for planar motor stage2018
Methods for limiting counter-mass trim-motor force and stage assemblies incorpor2016
Method for determining a commutation offset and for determining a compensation m2016
Method for determining a commutation offset and for determining a compensation m2016
Method for calibrating a force constant of a motorized stage used for supporting2016
Method and apparatus to allow a plurality of stages to operate in close proximit2015
Method for determing a commutation offset and for determining a compensation map2015
Method for determing a commutation offset and for determining a compensation map2015
Control systems and methods for compensating for effects of a stage motor2014