Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lightwave interference measurement apparatus used to measure optical path length or distance

Lightwave interference measurement apparatus used to measure optical path length or distance

US Patent 8416422 · Granted Apr 9, 2013

Estimated economic value: $67,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for identifying ownership and managing transfer of ownership o2024
Information processing system2024
Measurement apparatus2018
Measuring apparatus including multi-wavelength interferometer2016
Shape measuring apparatus, and method of manufacturing article2016
Measurement apparatus to calculate wavefront aberration of optical system using 2015
Measuring apparatus2015
Measurement apparatus2014
Measurement apparatus2014
Interferometer and distance calculation method therefor2014
Measurement apparatus, exposure apparatus, and device fabrication method2014
Optical interferometer2013