Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers

Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers

US Patent 8334984 · Granted Dec 18, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Conformal coatings for quantum vacuum applications2025
Compact, high-performance MEMS-based optical shutter2020
Low cost wafer level process for packaging MEMS three dimensional devices2019
Through-wafer interconnects for MEMS double-sided fabrication process (TWIDS)2017
Single wafer fabrication process for wavelength dependent reflectance for linear2012
Single wafer fabrication process for wavelength dependent reflectance for linear2012
Compact atomic magnetometer and gyroscope based on a diverging laser beam2011