Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10167190 | Low cost wafer level process for packaging MEMS three dimensional devices | Alexandra Efimovskaya, Doruk Senkal | 2019-01-01 |
| 9611138 | Through-wafer interconnects for MEMS double-sided fabrication process (TWIDS) | Alexandra Efimovskaya | 2017-04-04 |
| 8334984 | Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers | Maximillian A. Perez | 2012-12-18 |
| 8318524 | Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers | Maximillian A. Perez | 2012-11-27 |
| 7872473 | Compact atomic magnetometer and gyroscope based on a diverging laser beam | John Kitching, Elizabeth Ann Donley, Eleanor Hodby, Erik J. Eklund | 2011-01-18 |