Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods of fabricating MEMS with spacers between plates and devices formed by same

Methods of fabricating MEMS with spacers between plates and devices formed by same

US Patent 8284475 · Granted Oct 9, 2012

Estimated economic value: $12,393,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Anchor and cavity configuration for MEMS-based cooling systems2025
Method for fabricating MEMS-based cooling systems2025
Tiles having multiple cooling cells for MEMS-based cooling2025
Cover for MEMS-based cooling systems2024
Hood for MEMS-based cooling systems2024
Method and system for fabricating a piezoelectric device2024
MEMS-based airflow system having a vibrating fan element arrangement2023
Mobile device case including an active cooling system2022
Systems and methods to present multiple frames on a touch screen2018
Low-profile lighting systems2016
Conductive bus structure for interferometric modulator array2015
Spatial light modulator with integrated optical compensation structure2015