MEMS-based airflow system having a vibrating fan element arrangement

Assignee

• Frore Systems

Inventors

• Ananth Saran Yalamarthy (23 patents)
• Vikram Mukundan (30 patents)
• Suryaprakash Ganti (96 patents)
• Narayana Prasad Rayapati (15 patents)
• Prabhu Sathyamurthy (40 patents)
• Seshagiri Rao Madhavapeddy (71 patents)
• Marc Mignard (52 patents)
• Brian J. Gally (94 patents)

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