Method for fabricating MEMS-based cooling systems

Assignee

• Frore Systems

Inventors

• Suryaprakash Ganti (96 patents)
• Brian J. Gally (94 patents)
• Ming-Hau Tung (62 patents)
• Seshagiri Rao Madhavapeddy (71 patents)
• Vikram Mukundan (30 patents)
• Ananth Saran Yalamarthy (23 patents)
• Leonard Eugene Fennell (13 patents)

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