Load lock fast pump vent

Assignee

• Brooks Automation Gmbh

Inventors

• Christopher Hofmeister (131 patents)
• Martin R. Elliot (7 patents)
• Alexander Krupyshev (36 patents)
• Joseph Hallisey (8 patents)
• Joseph A. Kraus (14 patents)
• William J. Fosnight (123 patents)
• Craig J. Carbone (6 patents)
• Jeffrey C. Blahnik (6 patents)
• Ho Yin Owen Fong (6 patents)

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