Magnetron sputtering apparatus and magnetron sputtering method

Assignee

• Ulvac

Inventors

• Yasuhiko Akamatsu (5 patents)
• Kyuzo Nakamura (43 patents)
• Motoshi KOBAYASHI (4 patents)
• Junya Kiyota (5 patents)
• Tomiyuki YUKAWA (1 patents)
• Masaki Takei (9 patents)
• Yuuichi Oishi (1 patents)
• Makoto Arai (66 patents)
• Satoru Ishibashi (24 patents)

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