Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8221594 | Magnetron sputtering apparatus and magnetron sputtering method | Yasuhiko Akamatsu, Kyuzo Nakamura, Motoshi KOBAYASHI, Junya Kiyota, Tomiyuki YUKAWA +3 more | 2012-07-17 |