Ultrapure colloidal silica for use in chemical mechanical polishing applications

Assignee

• Fujifilm Planar Solutions

Inventors

• Deepak Mahulikar (82 patents)
• Yuhu Wang (15 patents)
• Ken A. Delbridge (2 patents)
• Gert Moyaerts (4 patents)
• Saeed H. Mohseni (9 patents)
• Nichole R. Koontz (2 patents)
• Bin Hu (50 patents)
• Liqing Wen (14 patents)

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