Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method

Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method

US Patent 8208128 · Granted Jun 26, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Encoder apparatus using liquid to suppress detection failure2014
Exposure apparatus, exposure method, and device fabrication method2014
Movable body apparatus, exposure apparatus and pattern formation apparatus, and 2014
Encoder that optically detects positional information of a moving body from diff2014
Encoder that detects positional information of a moving body generating interfer2014
Encoder apparatus using liquid to suppress detection failure2013
Movable-body apparatus, exposure apparatus, exposure method, and device manufact2013
Exposure apparatus, exposure method, and device fabrication method2012
Encoder that optically detects positional information of a movable body by chang2012
Immersion exposure apparatus and device manufacturing method with no liquid reco2011
Exposure apparatus, exposure method, and device fabrication method2011
Positional information detecting device2010