Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method

Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method

US Patent 8390780 · Granted Mar 5, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electric work machine2025
Biaxially oriented polypropylene film2025
Biaxially oriented polypropylene film2025
Encoder device, drive device, stage device, and robot device2025
Biaxially oriented polypropylene film2025
Biaxially oriented polypropylene film2025
Flow cytometer2025
Observation device2025
Battery management system, battery management method, and method of manufacturin2025
Biaxially-oriented polypropylene film2025
Biaxially oriented polypropylene film2024
Image forming apparatus including developer conveying member and toner concentra2024