Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure

Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure

US Patent 8064037 · Granted Nov 22, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical device and optical unit including optical device2024
Vibrating device and optical detection apparatus2024
Cleaning device, and image capturing apparatus including cleaning device2022
Vibration device and imaging unit including vibration device2022
Vibration device and imaging unit including vibration device2022
Charged particle beam optical apparatus, exposure apparatus, exposure method, co2022
Vibration device and imaging unit including vibration device2022
Cleaning device, and image capturing apparatus including cleaning device2021
Charged particle beam optical apparatus, exposure apparatus, exposure method, co2021
Exposure method and device manufacturing method having lower scanning speed to e2019
Exposure apparatus and device manufacturing method having lower scanning speed t2019
Exposure apparatus, exposure method, and method for producing device2019