Water repellant composition for substrate to be exposed, method for forming resist pattern, electronic device produced by the formation method, treatment method for imparting water repellency to substrate to be exposed, water repellant set for substrate to be exposed, and treatment method for imparting water repellency to substrate to be exposed using the same

Assignee

• Renesas Electronics
• Asahi Glass Co.

Inventors

• Takeo Ishibashi (25 patents)
• Mamoru Terai (11 patents)
• Takuya Hagiwara (17 patents)
• Osamu Yokokoji (16 patents)
• Yoko Takebe (17 patents)

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