Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9223200 | Pellicle for lithography, pellicle-mounted photomask, and exposure treatment method | — | 2015-12-29 |
| 8236901 | Fluorinated compound, fluoropolymer and method for producing the compound | Koichi Murata, Naoko Shirota, Osamu Yokokoji | 2012-08-07 |
| 8178983 | Water repellant composition for substrate to be exposed, method for forming resist pattern, electronic device produced by the formation method, treatment method for imparting water repellency to substrate to be exposed, water repellant set for substrate to be exposed, and treatment method for imparting water repellency to substrate to be exposed using the same | Takeo Ishibashi, Mamoru Terai, Takuya Hagiwara, Osamu Yokokoji | 2012-05-15 |
| 8134033 | Fluorocompound having highly fluorinated norbornane structure, fluoropolymer, and their production processes | Yasuhisa Matsukawa, Daisuke Shirakawa, Eisuke Murotani, Naoko Shirota | 2012-03-13 |
| 7825275 | Fluorinated compound, fluoropolymer and method for producing the compound | Koichi Murata, Naoko Shirota, Osamu Yokokoji | 2010-11-02 |
| 7550545 | Fluorinated compound, and fluoropolymer, process for its production and resist composition containing it | Isamu Kaneko | 2009-06-23 |
| 7498393 | Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film | Masataka Eda, Osamu Yokokoji, Takashi Sasaki | 2009-03-03 |
| 7244545 | Fluorinated compound, fluoropolymer and process for its production | Osamu Yokokoji | 2007-07-17 |
| 7091294 | Fluoropolymer and resist composition | Masataka Eda, Osamu Yokokoji | 2006-08-15 |
| 7026416 | Fluoropolymer | Yasuhide Kawaguchi, Shinji Okada, Osamu Yokokoji, Isamu Kaneko | 2006-04-11 |
| 7015366 | Fluorinated compound, fluoropolymer and process for its production | Shun-ichi Kodama, Isamu Kaneko, Osamu Yokokoji, Shinji Okada, Yasuhide Kawaguchi | 2006-03-21 |
| 6984704 | Fluorinated compound, fluoropolymer and process for its production | Shun-ichi Kodama, Isamu Kaneko, Osamu Yokokoji, Shinji Okada, Yasuhide Kawaguchi | 2006-01-10 |
| 6916590 | Resist composition | Isamu Kaneko, Shun-ichi Kodama | 2005-07-12 |
| 6858692 | Fluorinated compound, fluoropolymer and process for its production | Isamu Kaneko | 2005-02-22 |
| 6818258 | Resist composition | Isamu Kaneko, Shinji Okada, Yasuhide Kawaguchi, Shun-ichi Kodama | 2004-11-16 |
| 6815146 | Resist composition | Shinji Okada, Yasuhide Kawaguchi, Isamu Kaneko, Shun-ichi Kodama | 2004-11-09 |
| 6733952 | Resist composition | Isamu Kaneko, Shinji Okada, Yasuhide Kawaguchi, Shun-ichi Kodama | 2004-05-11 |