Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements

Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements

US Patent 8163632 · Granted Apr 24, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate for an EUV-lithography mirror2021
Device for changing a surface shape of an optical element via electron irradiati2020
Wavefront correction element for use in an optical system2018
Method of refining solder materials2017
Method for operating a data receiver and data receiver, in particular in a vehic2015
Substrate for mirrors for EUV lithography2015
Substrate for mirrors for EUV lithography2015
Optical integrator for an illumination system of a microlithographic projection 2013
Irradiation with high energy ions for surface structuring and treatment of surfa2013
Irradiation with high energy ions for surface structuring and treatment of surfa2013
Rotor-shaft integrated generator drive apparatus2013
Removing reflective layers from EUV mirrors2011