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Home › Methods for forming a composite pattern including printed resolution assist features

Methods for forming a composite pattern including printed resolution assist features

US Patent 8158334 · Granted Apr 17, 2012

Estimated economic value: $5,847,000 ⓘ

Assignee

IBM

Inventors

Allen H. Gabor (42 patents)
Scott D. Halle (43 patents)
Helen Wang (12 patents)

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