{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Method for forming a ruthenium film", "item": "https://www.patentleaderboard.com/patent/8124528"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for forming a ruthenium film

Method for forming a ruthenium film

US Patent 8124528 · Granted Feb 28, 2012

Estimated economic value: $4,027,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Doped titanium nitride materials for dram capacitors, and related semiconductor 2025
Vertical transistor, integrated circuitry, method of forming a vertical transist2025
Vertical transistors having at least 50% grain boundaries offset between top and2025
Vertical transistor, integrated circuitry, method of forming a vertical transist2024
Ferroelectric capacitor, a ferroelectric memory cell, an array of ferroelectric 2023
Carry handle anchor system2023
Vertical transistors with channel region having vertically elongated crystal gra2022
Doped titanium nitride materials for DRAM capacitors, and related semiconductor 2022
Vertical transistor, integrated circuitry, method of forming a vertical transist2022
Semiconductor structures including liners comprising alucone and related methods2022
Ferroelectric capacitor, a ferroelectric memory cell, an array of ferroelectric 2021
Methods of forming devices including multi-portion liners2021