Assignee
Inventors
- Gen You (17 patents)
- Makoto Muramatsu (49 patents)
- Hiroyuki Fujii (140 patents)
- Shouichi Terada (10 patents)
- Takanori Nishi (25 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Substrate processing method and computer storage medium", "item": "https://www.patentleaderboard.com/patent/8084372"}]}
Skip to contentUS Patent 8084372 · Granted Dec 27, 2011