Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus and the upper electrode unit

Plasma processing apparatus and the upper electrode unit

US Patent 8083891 · Granted Dec 27, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing apparatus and plasma processing method2025
Plasma processing method and plasma processing apparatus2024
Plasma processing apparatus and plasma processing method2023
Annular member, plasma processing apparatus and plasma etching method2022
Plasma processing apparatus and plasma processing method2021
Plasma processing apparatus and plasma processing method2020
Substrate processing apparatus2016
Focusing ring2014
Reflecting device, communicating pipe, exhausting pump, exhaust system, method f2014
Substrate mounting table of substrate processing apparatus2014
Heat-transfer structure and substrate processing apparatus2013
Plasma processing method and apparatus2012