Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Laser-based apparatus and method for measuring agglomerate concentration and mean agglomerate size

Laser-based apparatus and method for measuring agglomerate concentration and mean agglomerate size

US Patent 8040508 · Granted Oct 18, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatuses, processes, and systems for measuring particle size distribution and2016
Laser-based apparatus and method for measuring agglomerate concentration and mea2010
Signal processing method for in-situ, scanned-beam particle monitoring2005
In situ sensor for near wafer particle monitoring in semiconductor device manufa1999
Method for measuring particle size in the presence of multiple scattering1997
Ensemble scattering particle sizing system with axial spatial resolution1992