Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459194 | Apparatuses, processes, and systems for measuring particle size distribution and concentration | William Henry Benner | 2016-10-04 |
| 8040508 | Laser-based apparatus and method for measuring agglomerate concentration and mean agglomerate size | — | 2011-10-18 |
| 7782459 | Laser-based apparatus and method for measuring agglomerate concentration and mean agglomerate size | — | 2010-08-24 |
| 6906799 | Signal processing method for in-situ, scanned-beam particle monitoring | Michel Pierre Bonin, Aaron Stibbich | 2005-06-14 |
| 5943130 | In situ sensor for near wafer particle monitoring in semiconductor device manufacturing equipment | Michel Pierre Bonin | 1999-08-24 |
| 5619324 | Method for measuring particle size in the presence of multiple scattering | Thomas Lawrence Harvill | 1997-04-08 |
| 5101113 | Ensemble scattering particle sizing system with axial spatial resolution | Edwin D. Hirleman, Jr. | 1992-03-31 |