Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Nanoparticle cap layer

Nanoparticle cap layer

US Patent 8039379 · Granted Oct 18, 2011

Estimated economic value: $15,576,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Selective capping of copper2012
Protection of Cu damascene interconnects by formation of a self-aligned buffer l2011
Nanoparticle cap layer2011
Nanoparticle cap layer2011
Protection of Cu damascene interconnects by formation of a self-aligned buffer l2008
Integrated circuit having a doped porous dielectric and method of manufacturing 2008
Selective refractory metal and nitride capping2007
Method of fabricating low dielectric constant dielectric films2006
Inhomogeneous materials having physical properties decoupled from desired functi2005
Selective refractory metal and nitride capping2005
Method for processing silicon workpieces using hybrid optical thermometer system2004
Method of fabricating low dielectric constant dielectric films2004