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Home › Method for reducing leakage currents caused by misalignment of a contact structure by increasing an error tolerance of the contact patterning process

Method for reducing leakage currents caused by misalignment of a contact structure by increasing an error tolerance of the contact patterning process

US Patent 7998823 · Granted Aug 16, 2011

Estimated economic value: $3,370,000 ⓘ

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