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Home › Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses

Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses

US Patent 7913706 · Granted Mar 29, 2011

Estimated economic value: $3,236,000 ⓘ

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