Extreme ultraviolet light and X-ray source target and manufacturing method thereof

Assignee

• Osaka University

Inventors

• Keiji Nagai (9 patents)
• Qincui Gu (1 patents)
• Takayoshi Norimatsu (2 patents)
• Shinsuke Fujioka (17 patents)
• Hiroaki Nishimura (67 patents)
• Katsunobu Nishihara (5 patents)
• Noriaki Miyanaga (8 patents)
• Yasukazu Izawa (6 patents)

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