Assignee
Inventors
- Hieu Lam (9 patents)
- Hongyu Yue (28 patents)
- John Christopher Shriner (7 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Method and system for predicting process performance using material processing tool and sensor data", "item": "https://www.patentleaderboard.com/patent/7844559"}]}
Skip to contentUS Patent 7844559 · Granted Nov 30, 2010