Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Device and method for wet treating disc-shaped articles

Device and method for wet treating disc-shaped articles

US Patent 7837803 · Granted Nov 23, 2010

Estimated economic value: $6,289,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vapor delivery head for preventing stiction of high aspect ratio structures and/2025
Spin chuck with concentrated center and radial heating2020
Method and apparatus for liquid treatment of wafer shaped articles2018
Method and apparatus for liquid treatment of wafer shaped articles2017
Method and apparatus for liquid treatment of wafer shaped articles2016
Method and apparatus for liquid treatment of wafer shaped articles2016
Device and method for wet treating disc-shaped articles2015
Closed chamber for wafer wet processing2015
Device for liquid treatment of disk-shaped objects2006