Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Scatterometry multi-structure shape definition with multi-periodicity

Scatterometry multi-structure shape definition with multi-periodicity

US Patent 7747424 · Granted Jun 29, 2010

Estimated economic value: $6,570,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for analyzing defects in CVD films2025
Systems and methods for analyzing defects in CVD films2023
Modulated reflectance measurement system using UV probe2014
High resolution monitoring of CD variations2011
Methods for depth profiling in semiconductors using modulated optical reflectanc2011
High resolution monitoring of CD variations2011
Methods for depth profiling in semiconductors using modulated optical reflectanc2010
Detector configurations for optical metrology2010
Modulated reflectance measurement system using UV probe2010
Modulated reflectance measurement system with multiple wavelengths2009
Global shape definition method for scatterometry2009
High resolution monitoring of CD variations2009