Contamination barrier with expandable lamellas

Assignee

• Asml Netherlands B.V.

Inventors

• Levinus Pieter Bakker (77 patents)
• Marcel Mathijs Theodore Marie Dierichs (62 patents)
• Johannes Maria Freriks (5 patents)
• Frank Jeroen Pieter Schuurmans (41 patents)
• Jakob Vijfvinkel (18 patents)
• Wilhelmus Josephus Box (31 patents)

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