Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for hard mask CD trim

Method for hard mask CD trim

US Patent 7667281 · Granted Feb 23, 2010

Estimated economic value: $34,838,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cloud provisioning readiness verification2024
Systems for removing and replacing consumable parts from a semiconductor process2021
Process for recovering gold from ores2021
Methods for detecting endpoint for through-silicon via reveal applications2018
Systems and methods for detecting endpoint for through-silicon via reveal applic2017
Method for achieving smooth side walls after Bosch etch process2014
Method for providing high etch rate2013
Email proxy server with first respondent binding2013
Aspect ratio adjustment of mask pattern using trimming to alter geometry of phot2013
Process for wafer temperature verification in etch tools2011
Dynamic discovery and database password expiration management2010
In-situ pre-coating of plasma etch chamber for improved productivity and chamber2010