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Home › Ionic, organic photoacid generators for DUV, MUV and optical lithography based on peraceptor-substituted aromatic anions

Ionic, organic photoacid generators for DUV, MUV and optical lithography based on peraceptor-substituted aromatic anions

US Patent 7655379 · Granted Feb 2, 2010

Estimated economic value: $8,575,000 ⓘ

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