Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor apparatus and cleaning unit thereof

Semiconductor apparatus and cleaning unit thereof

US Patent 7635417 · Granted Dec 22, 2009

Estimated economic value: $19,145,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Adjustable fastening device for plasma gas injectors2023
Integrated circuit fabrication system with adjustable gas injector2023
Adjustable fastening device for plasma gas injectors2022
Adjustable fastening device for plasma gas injectors2022
Integrated circuit fabrication system with adjustable gas injector and method ut2021
Adjustable fastening device for plasma gas injectors2020
Method and system for monitoring temperature of wafer2019
Fan-out circuit and display device using the same2018
Fan-out structure and display panel using the same2016
Apparatus for visualization of process chamber conditions2007