Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and system for monitoring temperature of wafer

Method and system for monitoring temperature of wafer

US Patent 10365672 · Granted Jul 30, 2019

Estimated economic value: $6,646,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor device comprising channel layers with different thicknesses2025
Non-conformal gate oxide formation on FinFET2025
Manufacturing method and manufacturing equipment for corrugated net2025
NanoStructure field-effect transistor device and methods of forming2025
Semiconductor devices having funnel-shaped gate structures2025
Pulp molding production line and processing method thereof2025
Gate oxide of nanostructure transistor with increased corner thickness2025
Pulp molding production line and processing method2024
Transfer device applied to robotic arm and production line for pulp molding2024
Manufacturing method and manufacturing equipment for corrugated net2024
Transfer device applied to pulp molded manipulator, and production line2024
Semiconductor devices having gate structures with slanted sidewalls2024