Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method

Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method

US Patent 7618767 · Granted Nov 17, 2009

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Illumination optical apparatus, exposure apparatus, and exposure method with opt2019
Exposure apparatus, exposure method, and method for producing device2018
Exposure apparatus, exposure method, and method for producing device2018
Illumination optical apparatus, exposure apparatus, and exposure method with opt2018
Method for evaluating and improving pupil luminance distribution, illumination o2017
Light source optimizing method, exposure method, device manufacturing method, pr2017
Exposure apparatus, exposure method, and method for producing device2016
Exposure apparatus, exposure method, and method for producing device2016
Measuring method and measuring apparatus of pupil transmittance distribution, ex2016
Illumination optical apparatus, exposure apparatus, and exposure method with opt2015
Transmission optical system, illumination optical system, exposure apparatus, an2015
Exposure apparatus, exposure method, and method for producing device2014