Assignee
- Ihp-Gmbh - Innovations For High Performance Microelectronics/Institut Fur Innovative Mikroelektronik
Inventors
- Bernd Heinemann (19 patents)
- Karl-Ernst Ehwald (16 patents)
- Dieter Knoll (20 patents)
- Bernd Tillack (11 patents)
- Dirk Wolansky (4 patents)
- Peter Schley (4 patents)