Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Actuator arrangement for active vibration isolation using a payload as an inertial reference mass

Actuator arrangement for active vibration isolation using a payload as an inertial reference mass

US Patent 7571793 · Granted Aug 11, 2009

Estimated economic value: $1,023,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Portable textile treatment device with image sensor and thermal insulation means2022
Lithographic apparatus and device manufacturing method2020
Substrate handling system and lithographic apparatus2019
Lithographic apparatus and device manufacturing method2018
Suction unit and autonomous vacuum cleaner2015
Air-conditioning system and use thereof2015
Lithographic apparatus and stage system2015
Actuator arrangement for active vibration isolation comprising an inertial refer2014
Lithographic apparatus and device manufacturing method2014
Position control system, a lithographic apparatus and a method for controlling a2012
Actuator arrangement for active vibration isolation comprising an inertial refer2012
Masking device, lithographic apparatus, and device manufacturing method2011