Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and system for focusing a charged particle beam

Method and system for focusing a charged particle beam

US Patent 7535001 · Granted May 19, 2009

Estimated economic value: $24,403,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for evaluating objects2021
X-ray based metrology of a high aspect ratio hole2021
Scanning an object using multiple mechanical stages2018
Inspection of regions of interest using an electron beam system2017
Method for charging and imaging an object2017
System and method for scanning an object2016
Inspection of regions of interest using an electron beam system2016
Variable rate scanning in an electron microscope2012
Method and system for focusing a charged particle beam2008
Methods of scanning an object that includes multiple regions of interest using a2007
System and method for inspecting charged particle responsive resist2007