Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatuses and methods for suppressing thermally-induced motion of a workpiece

Apparatuses and methods for suppressing thermally-induced motion of a workpiece

US Patent 7501607 · Granted Mar 10, 2009

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Workpiece processing apparatus with thermal processing systems2024
Control system for adaptive control of a thermal processing system2024
Arc lamp with forming gas for thermal processing systems2024
Nitrogen injection for arc lamps2024
Workpiece processing apparatus with plasma and thermal processing systems2023
Substrate support in a millisecond anneal system2023
Arc lamp with forming gas for thermal processing systems2023
Control system for adaptive control of a thermal processing system2023
Insulating wrap for beehives2022
Gas flow control for millisecond anneal system2022
Nitrogen injection for ARC lamps2021
Substrate support in a millisecond anneal system2020